sputtering - CISMeF

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CISMeF

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SputteringIUPAC Term

Preferred Label : sputtering;

IUPAC definition : Removal of surface material (atoms, clusters and molecules) by particle bombardment.;

Details

Origin ID

S05895;

See also
- clean up [IUPAC Term]
- diamond-like carbon films [IUPAC Term]

Keyword's position in hierarchy(ies) :

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07/07/2025

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