Preferred Label : diamond-like carbon films;
IUPAC acronym : DLC;
IUPAC definition : Diamond-like carbon (DLC) films are hard, amorphous films with a significant fraction
of sp3-hybridized carbon atoms and which can contain a significant amount of hydrogen.
Depending on the deposition conditions, these films can be fully amorphous or contain
diamond crystallites. These materials are not called diamond unless a full three-dimensional
crystalline lattice of diamond is proven.;
Scope note : diamond-like films without hydrogen can be prepared by carbon ion beam deposition,
ion-assisted sputtering from graphite or by laser ablation of graphite. diamond-like
carbon films containing significant contents of hydrogen are prepared by chemical
vapour deposition. the hydrogen content is usually over 25 atomic %. the deposition
parameters are (low) total pressure, hydrogen partial pressure, precursor molecules
and plasma ionization. the plasma activation can be radio frequency, microwave or
ar1 ions. high ionization favours amorphous films while high atomic hydrogen contents
favour diamond crystallite formation. because of the confusion about structure engendered
by the term diamond-like carbon films, the term hard amorphous carbon films has been
suggested as a synonym.;
Origin ID : D01673;
See also
Diamond-like carbon (DLC) films are hard, amorphous films with a significant fraction
of sp3-hybridized carbon atoms and which can contain a significant amount of hydrogen.
Depending on the deposition conditions, these films can be fully amorphous or contain
diamond crystallites. These materials are not called diamond unless a full three-dimensional
crystalline lattice of diamond is proven.
