Preferred Label : Micro-Electrical-Mechanical systems;
MeSH definition : A class of devices combining electrical and mechanical components that have at least
one of the dimensions in the micrometer range (between 1 micron and 1 millimeter).
They include sensors, actuators, microducts, and micropumps.;
MeSH synonym : Micro-Electrical-Mechanical system; Micro-Electro-Mechanical systems; system, Micro-Electro-Mechanical; systems, Micro-Electrical-Mechanical; micro electro mechanical systems; Micro-Electro-Mechanical system; systems, Micro-Electro-Mechanical; system, Micro-Electrical-Mechanical; MEMS; micro electrical mechanical systems;
MeSH hyponym : BioMEMS;
Wikipedia link : https://en.wikipedia.org/wiki/Micro-electro-mechanical systems;
Origin ID : D055617;
UMLS CUI : C1979923;
Allowable qualifiers
Automatic exact mappings (from CISMeF team)
Record concept(s)
Semantic type(s)
A class of devices combining electrical and mechanical components that have at least
one of the dimensions in the micrometer range (between 1 micron and 1 millimeter).
They include sensors, actuators, microducts, and micropumps.