MeSH definition : Manufacturing technology for making microscopic devices in the micrometer range (typically
1-100 micrometers), such as integrated circuits or MEMS. The process usually involves
replication and parallel fabrication of hundreds or millions of identical structures
using various thin film deposition techniques and carried out in environmentally-controlled
clean rooms.;
Manufacturing technology for making microscopic devices in the micrometer range (typically
1-100 micrometers), such as integrated circuits or MEMS. The process usually involves
replication and parallel fabrication of hundreds or millions of identical structures
using various thin film deposition techniques and carried out in environmentally-controlled
clean rooms.