Preferred Label : Microfabrication;
NCIt definition : The processing techniques, such as deposition, etching, and patterning, that are utilized
to produce miniaturized structures and devices with feature sizes and resolution in
the micron domain. Uses a combination of micromachining and integrated circuit fabrication
technology. (from U. Louisville course description);
Origin ID : C20066;
UMLS CUI : C1513271;
Automatic exact mappings (from CISMeF team)
- Semantic type(s)
- UMLS correspondences (same concept)
