" /> poly(4-hydroxystyrene-co-2-ethyl-2-adamantyl methacrylate-co-phenyl methacrylate dimethylsulfonium nonaflate) - CISMeF





Preferred Label : poly(4-hydroxystyrene-co-2-ethyl-2-adamantyl methacrylate-co-phenyl methacrylate dimethylsulfonium nonaflate);

MeSH note : an EUV resist; structure in first source;

MeSH synonym : poly(HOST-co-EAMA-co-PAG);

Is substance : O;

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24/04/2025


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