Preferred Label : lateral resolution;
Detailed label : lateral resolution in in situ microanalysis;
IUPAC definition : For qualitative analysis, this should be defined as the minimum distance of two points
(areas) on the specimen corresponding to signal levels of 16 and 84%. For electron
signals originating from top surface layers like secondary or Auger electrons and
secondary ions the lateral resolution for qualitative purposes corresponds to the
beam diameter. For signals originating in a greater depth of the sample (back scattered
electrons, X-rays) the lateral resolution is worse than the corresponding value of
the beam diameter due to the diffusion of the primary electrons. The lateral resolution
may be determined exactly with a sandwich specimen or a sharp edge specimen, or approximately
with a specimen showing a regular microstructure of known dimensions. Recommended
abbreviation: Lat. Res. (qualitative); unit: m; range: nm or µm. For quantitative
analysis, this should be defined as the minimum distance of two points (areas) on
the specimen corresponding to signal ratios of 10E4. This condition assures that the
value for the lateral resolution defines the diameter of the analytical area which
yields the total analytical signal. Due to the effect of electron diffusion in a solid
and 'tail effects' in ion beam analysis the quantitative lateral resolution is significantly
larger than the beam diameter. Recommended abbreviation: Lat. Res. (quantitative);
unit: m; range: nm or µm.;
Origin ID : L03483;
See also
For qualitative analysis, this should be defined as the minimum distance of two points
(areas) on the specimen corresponding to signal levels of 16 and 84%. For electron
signals originating from top surface layers like secondary or Auger electrons and
secondary ions the lateral resolution for qualitative purposes corresponds to the
beam diameter. For signals originating in a greater depth of the sample (back scattered
electrons, X-rays) the lateral resolution is worse than the corresponding value of
the beam diameter due to the diffusion of the primary electrons. The lateral resolution
may be determined exactly with a sandwich specimen or a sharp edge specimen, or approximately
with a specimen showing a regular microstructure of known dimensions. Recommended
abbreviation: Lat. Res. (qualitative); unit: m; range: nm or µm. For quantitative
analysis, this should be defined as the minimum distance of two points (areas) on
the specimen corresponding to signal ratios of 10E4. This condition assures that the
value for the lateral resolution defines the diameter of the analytical area which
yields the total analytical signal. Due to the effect of electron diffusion in a solid
and 'tail effects' in ion beam analysis the quantitative lateral resolution is significantly
larger than the beam diameter. Recommended abbreviation: Lat. Res. (quantitative);
unit: m; range: nm or µm.