Preferred Label : ion microscopy;
IUPAC acronym : SIMS;
IUPAC definition : Use of the secondary ion mass spectrometry (SIMS) technique to obtain micrographs
of the elemental (or isotopic) distribution at the surface of a sample with a spatial
resolution of 2 µm or better.;
Origin ID : I03221;
See also
Use of the secondary ion mass spectrometry (SIMS) technique to obtain micrographs
of the elemental (or isotopic) distribution at the surface of a sample with a spatial
resolution of 2 µm or better.
