Preferred Label : electron probe X-ray microanalysis;
Detailed label : electron probe X-ray microanalysis (EPXMA);
IUPAC acronym : EPXMA;
IUPAC definition : Any analytical technique which uses the excitation and evaluation of the characteristic
X-ray spectrum of a solid specimen by a focused electron beam (typically of a diameter
of less than 1 µm). Qualitative and quantitative X-ray analysis is the main feature
of EPXMA. For obtaining supplementary information the secondary, back scattered and
absorbed electrons are also frequently observed. Qualitative and quantitative X-ray
analysis is, however, the main feature of EPXMA.;
Origin ID : E02007;
Automatic exact mappings (from CISMeF team)
- See also
Any analytical technique which uses the excitation and evaluation of the characteristic
X-ray spectrum of a solid specimen by a focused electron beam (typically of a diameter
of less than 1 µm). Qualitative and quantitative X-ray analysis is the main feature
of EPXMA. For obtaining supplementary information the secondary, back scattered and
absorbed electrons are also frequently observed. Qualitative and quantitative X-ray
analysis is, however, the main feature of EPXMA.
